Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements

In the presented work, a model of microelectromechanical accelerometer with two microbeam sensing elements located between fixed electrodes is proposed. The action inertia forces in longitudinal direction affects spectral properties system. dynamics system presence weak electrostatic coupling sensitive characterized by phenomenon modal localization - significant change amplitude ratios for forms in-phase and anti-phase oscillations small changes applied acceleration. Diagrams equilibrium positions are obtained varying potential difference electrode movable element elements. dependences frequencies ratio components eigenvectors on magnitude inertial investigated. It concluded that sensitivity proposed sensor orders higher than frequency shift sensitivity. Peculiarities nonlinear investigated case external harmonic actuation. Principal characteristics mode revealed linearized describing real dynamic operation taking into account effects.